Optical Metrology Basics: Spectral Sensors
Fan of Rays
A spectral sensor is a miniaturized spectrometer equipped with a detector array. The spectrometer spreads the incoming bunch of rays according to wavelengths, and the detector array captures the complete spectrum simultaneously during the exposure time. Spectral sensors thus provide detailed access to the spectral information of the incoming radiation. This article describes some of the optical principles of spectral sensors.